Apparatus and method for wafer cleaning

ABSTRACT

The present disclosure relates to an apparatus and a method for wafer cleaning. The apparatus can include a wafer holder configured to hold a wafer; a cleaning nozzle configured to dispense a cleaning fluid onto a first surface (e.g., front surface) of the wafer; and a cleaning brush configured to clean a second surface (e.g., back surface) of the wafer. Using the cleaning fluid, the cleaning brush can clean the second surface of the wafer with a scrubbing motion and ultrasonic vibration.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. Pat. Application No.16/532,701, titled “Apparatus and Method for Wafer Cleaning,” filed Aug.6, 2019, which claims the benefit of U.S. Provisional Pat. ApplicationNo. 62/764,651, titled “Apparatus and Method for Wafer Cleaning,” filedAug. 15, 2018, each of which is incorporated by reference herein in itsentirety.

BACKGROUND

Cleaning semiconductor wafers (e.g., silicon wafers) is an operationperformed in the manufacturing process of semiconductor devices andmicroelectromechanical systems (MEMS). An objective of the wafercleaning process is to remove chemical and particle impurities withoutaltering or damaging a wafer’s surface or substrate. Semiconductor waferyield is inversely related to defect density (e.g., cleanliness andparticle count) from wafer processing. In other words, a lower defectdensity results in higher semiconductor wafer yield.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. Inaccordance with the common practice in the industry, various featuresare not drawn to scale. In fact, the dimensions of the various featurescan be arbitrarily increased or reduced for clarity of illustration anddiscussion.

FIG. 1 is a diagram of an exemplary wafer cleaning apparatus, inaccordance with some embodiments.

FIG. 2 is a diagram of an exemplary cleaning brush and an image sensor,in accordance with some embodiments,

FIGS. 3A and 3B are diagrams of an exemplary wafer cleaning apparatus indifferent operation modes, in accordance with some embodiments.

FIG. 4 is a flow chart of an exemplary wafer cleaning method, inaccordance with some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over a second feature in the description that followscan include embodiments in which the first and second features areformed in direct contact, and can also include embodiments in whichadditional features are disposed between the first and second features,such that the first and second features are not in direct contact. Inaddition, the present disclosure can repeat reference numerals and/orletters in the various examples. This repetition does not in itselfdictate a relationship between the various embodiments and/orconfigurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper,” and the like, can be used herein for ease ofdescription to describe one element or feature’s relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus can be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein can likewise be interpreted accordingly.

The term “nominal” as used herein refers to a desired, or target, valueof a characteristic or parameter for a component or a process operation,set during the design phase of a product or a process, together with arange of values above and/or below the desired value. The range ofvalues can be due to slight variations in manufacturing processes ortolerances.

The term “horizontal,” as used herein, means normally parallel to alevel ground.

The term “vertical,” as used herein, means nominally perpendicular to alevel ground.

In some embodiments, the terms “about” and “substantially” can indicatea value of a given quantity that varies within 5% of the value (e.g., ±1%, ±2%, ±3%, ±4%, ±5% of the value).

Wafer cleaning is a process to remove contamination introduced duringthe semiconductor fabrication process. The contamination can includeorganics (e.g., organic byproducts), metallics (traces of metals), andnative oxides. The wafer cleaning process includes dry cleaning methods,wet cleaning methods, or a combination thereof. Further, the wafercleaning process can be performed in wet tools, which can handle eitherbatches of wafers (e.g., in a bath) or a single wafer at a time (e.g.,“single-wafer” tools).

For example, in a single-wafer tool, the wafer enters a cleaning moduleand is positioned on a wafer stage. The wafer is then subjected to awafer cleaning process via one or more nozzles positioned above thewafer’s surface. The one or more nozzles can flow chemicals (e.g., achemical solution, deionized water, etc.) under pressure on the wafer’ssurface to remove contamination. After the wafer cleaning process, thewafer can be dried (e.g., via spinning) and released from the wetcleaning tool.

This disclosure is directed to an apparatus and a method for wafercleaning that uses a cleaning brush to clean a back surface (e.g.,backside) of the wafer. With a cleaning fluid, the brush cleans the backsurface of the wafer with a scrubbing motion and ultrasonic vibration.Such apparatus and method improves the removal of the defects from thewafer.

FIG. 1 is a diagram of an exemplary wafer cleaning apparatus 100, inaccordance with some embodiments. Wafer cleaning apparatus 100 caninclude a wafer holder 120, a cleaning nozzle 130, and a cleaning brush150. In some embodiments, wafer cleaning apparatus 100 can include anenclosure 105 configured to enclose wafer holder 120, cleaning nozzle130, and cleaning brush 150. In some embodiments, the z-direction inFIG. 1 can be along a gravitational direction of an environment wherewafer cleaning apparatus 100 is located.

In some embodiments, enclosure 105 can form an inner space (or achamber) of wafer cleaning apparatus 100 in which the wafer cleaning isperformed. In some embodiments, enclosure 105 can include vertical walls(e.g., along the z-axis), a ceiling (e.g., along the x-axis and y-axis),and a floor (e.g., along the x-axis and y-axis and below the ceiling).In some embodiments, one or more openings 106 can be made in one or moreof the vertical walls, ceiling, and floor to install units for gasexchange, e.g., sucking air or expelling exhaust. A noncombustiblematerial can be used to form enclosure 105 to avoid flammability. Thenoncombustible material can include, but is not limited to, ethylenechlorotrifluoroethylene (ECTFE), polyvinylidene fluoride (PVDF),perfluoroalkoxy alkane (PFA), or a combination thereof.

Wafer cleaning apparatus 100 can include wafer holder 120 configured tohold (or secure) a wafer 110 inside enclosure 105. In some embodiments,wafer holder 120 can further include a heating plate (not shown in FIG.1 ) configured to heat wafer 110 during the wafer cleaning process toenhance the cleaning efficiency. Wafer holder 120 can also includemultiple support pins 122 and multiple clamp pins 124 to hold wafer 110and prevent wafer 110 from sliding during the wafer cleaning process. Insome embodiments, wafer holder 120 can include a six-pin design withthree additional support pins (e.g., clamp pins, not shown in FIG. 1 )to reduce wafer slide during wafer cleaning. In some embodiments, aninner flow system (not shown in FIG. 1 ) can be operatively coupled towafer holder 120 and configured to introduce gas flow to wafer 110during the wafer cleaning process to facilitate the removal of cleaningfluids. Wafer holder 120 can be further attached to a spin base 125. Insome embodiments, wafer holder 120 can spin wafer 110 via spin base 125,which spins wafer 110 at different speeds during the wafer cleaningprocess. In some embodiments, wafer holder 120 can be configured to hold(or secure) the wafer horizontally (e.g., along the x-y plane) orvertically (e.g., along the x-z plane) during the wafer cleaningprocess.

Wafer cleaning apparatus 100 can include a cleaning nozzle 130configured to supply a flow of (or dispense) a cleaning fluid 145 onto afront surface of wafer 110. As used herein, the front surface of wafer110 refers to a major surface on which semiconductor device(s) can beformed. When wafer 110 is held onto wafer holder 120, the front surfacefaces towards the ceiling (e.g., in the y-direction) of enclosure 105.Cleaning nozzle 130 can be configured to supply a flow of (or dispense)cleaning fluid 145 onto the front surface of wafer 110 at a presetamount onto the front surface of wafer 110. In some embodiments,cleaning nozzle 130 can be a pressure nozzle configured to rinse thewafer. Cleaning nozzle 130 can be attached to a nozzle arm 135, whichcan pivot around a spindle 140 during the wafer cleaning process. Insome embodiments, wafer cleaning apparatus 100 can be equipped with morethan one cleaning nozzle 130 depending on the design of wafer cleaningapparatus 100. In some embodiments, the distance between cleaning nozzle130 and wafer 110 can be adjusted or remain fixed for the duration ofthe wafer cleaning process. In some embodiments, the orientation ofcleaning nozzle 130 with respect to the front surface of wafer 110(e.g., the angle between cleaning nozzle 130 with respect to the frontsurface of wafer 110) can also be adjusted or remain fixed, according tosome embodiments, Cleaning nozzle 130 can be connected, via one or morechemical switch boxes (not shown in FIG. 1 ), to external tanks (notshown in FIG. 1 ) with chemicals. The chemical switch boxes can bechemical distribution systems, where valves and chemical distributionlines are housed and chemical solutions are pre-mixed prior to deliveryto cleaning nozzle 130. In some embodiments, cleaning nozzle 130 may ormay not pivot around spindle 140 while cleaning fluid 145 is supplied(or dispensed) on wafer 110. At the same time, wafer 110 may or may notbe rotated while cleaning fluid 145 is supplied (or dispensed) on wafer110.

In some embodiments, a portion of an outer surface of cleaning nozzle130 can be covered with a conductive layer 134 to reduce the risk ofstatic electric charge that can occur at cleaning nozzle 130 during thewafer cleaning process. In some embodiments, cleaning nozzle 130 can bemade of polychlorotrifluorocthylene (PCTFE) and/orpolytetrafluoroethylen (PTFE), which have static electricity values(e.g., -4.58 kV for PCTFE) that can increase the risk of static electriccharge during the operation of cleaning nozzle 130. By coating a portionof the outer surface of cleaning nozzle 130 with conductive layer 134,such as a conductive material with static electricity higher than about-4 kV (e.g., higher than about -4 kV, about -3.5 kV, about -3 kV, about-2.5 kV, about -2 kV, about -1.5 kV, or about -1 kV), the risk of staticelectric charge can be reduced. In some embodiments, conductive layer134 can include carbon nanotubes with a carbon doping of about between0.025 weight (wt)% and about 0.1 wt% (e.g., between 0.025 wt% and 0.1wt%, between 0.03 wt% and 0.09 wt%, between 0.04 wt% and 0.08 wt%, orbetween 0.05 wt% and 0.07 wt%). In some embodiments, an additionalgrounding unit (not shown in FIG. 1 ), such as a grounding plate or aconductive wire connecting to an external ground level, can be coupledto cleaning nozzle 130 to further reduce the risk of static electriccharge. In some embodiments, cleaning nozzle 130 can further include anionizer (not shown in FIG. 1 ) configured to supply corona discharges tocleaning nozzle 130 to reduce the static electric charge. Coronadischarges can be electrical discharges generated by an ionization of afluid, such as air, surrounding a conductor (e.g., conductive layer 134coated on the outer surface of cleaning nozzle 130) that is electricallycharged.

Cleaning fluid 145 can include, but is not limited to, hydrofluoricacid, hydrochloric acid, sulfuric acid, hydrogen peroxide, ammoniumhydroxide, acetone, methanol, isopropyl alcohol, deionized water (DIwater), or a combination thereof. In some embodiments, cleaning fluid145 can be a solution including, but is not limited to, a hydrochloricacid/hydrogen peroxide/DI water (HPM) solution, a sulfuric acid/hydrogenperoxide/DI water (SPM) solution, a hydrochloric acid/ ozone/DI water(HOM) solution, a sulfuric acid/ ozone/DI water (SOM) solution, anammonium hydroxide/ozone/DI water (AOM) solution, a hydrofluoric acid/DIwater (DHF) solution, an ozone solution (ozone diluted in DI water), ora combination thereof. One or more cleaning fluids can be supplied onthe wafer successively and independently from one another at differentstages of the wafer cleaning process. For example, an exemplary wafercleaning process can include a DHF operation and an HPM operation withanother cleaning operation in between. Depending on the specificcleaning fluid(s) used for wafer cleaning, the heating plate of waferholder 120 can heat wafer 110 to a suitable temperature. For example,for isopropyl alcohol, wafer 110 can be heated to from about 190° C. toabout 195° C. for about 30 seconds to boil the isopropyl alcohol. Insome embodiments, the heating plate of wafer holder 120 can heat wafer110 to from about 75° C. to about 85° C. for about 10 minutes to boilthe ammonium hydroxide/hydrogen peroxide/DI water (e.g., SC1 clean). Insome embodiments, the heating plate of wafer holder 120 can heat wafer110 to from about 75° C. to about 85° C. for about 10 minutes to boilthe hydrochloric acid/hydrogen peroxide/DI water (e.g., SC2 clean).

Wafer cleaning apparatus 100 can include a cleaning brush 150 configuredto clean a back surface (e.g., backside) of wafer 110. The back surface(e.g., backside) of wafer 110 refers to a surface opposite to the frontsurface of wafer 110—e.g., a surface opposite to a major surface ofwafer 110 on which semiconductor device(s) are formed. In someembodiments, cleaning brush 150 can include a plurality of bristles 151configured to scrub wafer 110; a brush body 152 configured to carry (orsecure) the plurality of bristles 151; a plurality of spray outlets 153configured to supply (or dispense) a cleaning fluid onto the backsurface of wafer 110; and an ultrasonic emitter 155 configured toultrasonically vibrate cleaning brush 150. In some embodiments, cleaningbrush 150 can also include a pressure sensor 157 configured to detectthe pressure applied to cleaning brush 150 against wafer 110, and alocation sensor 159 configured to track a location of cleaning brush 150against wafer 110. In some embodiments, wafer cleaning apparatus 100 canfurther include a motion mechanism (e.g., not shown in FIG. 1 ) tocontrol a translational or rotational movement of brush 150. In someembodiments, the motion mechanism can be configured to press brush 150to provide the pressure against wafer 110. In some embodiments, themotion mechanism can include a robotic arm (not shown in FIG. 1 ) or amotion stage (not shown in FIG. 1 ).

In some embodiments, plurality of bristles 151 can be arranged in aplurality of bristle clusters (e.g., 9 clusters as shown in FIG. 1 ).The number of bristle clusters can be any number larger than or equalto 1. For example, the number of bristle clusters can be between about 2and about 30. In some embodiments, the number of bristle clusters canrange from about 1 to about 30, according to some embodiments of thepresent disclosure. In some embodiments, each bristle cluster caninclude multiple bristles 151 having the same length, diameter,hardness, and/or material. In some embodiments, each bristle cluster caninclude multiple bristles 151 with different lengths to scrub an unevenor warped regions (not shown in FIG. 1 ) of wafer 110. For example, eachbristle cluster can include a first group of bristles 151 ₁ (shown inFIG. 2 ) and a second group of bristles 151 ₂ (shown in FIG. 2 ), wherea length of the bristles in first group of bristles 151 ₁ can be longerthan that of second group of bristles 151 ₂, Such bristle cluster withvarious length of bristles 151 can conformally contact an uneven orwarped surface of wafer 110, thus enhancing a cleaning efficiency ofbrush 150. In some embodiments, each bristle cluster can include firstgroup of bristles 151 ₁ and second group of bristles 151 ₂, where eachbristle 151 ₁ can be interleaved with each bristle 151 ₂. In someembodiments, each bristle cluster can include first group of bristles151 ₁ and second group of bristles 151 ₂, where bristles 151 ₁ cansurround bristles 151 ₂. Based on the disclosure herein, other lengthsand placements of bristles 151 (e.g., 151 ₁ and 151 ₂) on brush body 152are within the scope and spirit of this disclosure. In some embodiments,each bristle 151 can have a diameter between about 0.08 mm and about 1mm. In some embodiments, each bristle 151 can have a length betweenabout 5 mm and about 8 mm. In some embodiments, the material ofplurality of bristles 151 can include, but is not limited to,polyethylene terephthalate (PET), polypropylene (PP), polyvinyl chloride(PVC), polyamide (PA), or a combination thereof. In some embodiments,each bristle cluster can include multiple bristles 151 with differentlength, diameter, hardness, and/or material.

In some embodiments, brush body 152 can have a drum or a disk shape.Brush body 152 can be coupled to a rotating shaft, which applies arotational force from a rotation unit to brush body 152. The rotationunit can include a motor, with one or more drive pulleys and a belt forapplying the rotational force of the motor to the rotation shaft.Materials for brush body 152 can be wear-resistant materials, including,but is not limited to, polyoxymethylene (POM), polyethylene (PE),polypropylene (PP), polyvinyl chloride (PVC), polyethylene terephthalate(PET or PETE), polystyrene (Styrofoam), polytetrafluoroethylene(Teflon), polyvinylidine chloride (Saran), or a combination thereof.Brush body 152 can have a diameter between about 20 mm and about 40 mm(e.g., about 30 mm). In some embodiments, plurality of bristles 151 canbe embedded to a depth of about 1 mm to about 3 mm (e.g., about 2 mm)into brush body 152.

In some embodiments, cleaning brush 150 can include a plurality of sprayoutlets 153 configured to supply a cleaning fluid onto wafer 110 (e.g.,the back surface or backside of wafer 110) during the wafer cleaningprocess. Plurality of spray outlets 153 can be embedded in brush body152. The number of spray outlets 153 can be in the range from about 1 toabout 30. In some embodiments, a portion of an outer surface of sprayoutlets 153 can be covered with a conductive layer 154 to reduce therisk of static electric charge. In some embodiments, materials for sprayoutlets 153 can include polychlorotrifluoroethylene (PCTFE) and/orpolytetrafluoroethylen (PTFE), which have static electricity values(e.g., -4.58 kV for PCTFE) that can increase the risk of static electriccharge during the operation of spray outlets 153. By coating a portionof the outer surface of spray outlets 153 with conductive layer 154,such as a conductive material with static electricity higher than about-4 kV (e.g., higher than -4 kV, -3.5 kV, -3 kV, -2.5 kV, -2 kV, -1.5 kV,or -1 kV), the risk of static electric charge can be reduced. In someembodiments, conductive layer 154 can be carbon nanotubes with a carbondoping between about 0.025 weight (wt)% and about 0.1 wt% (e.g., between0.025 wt% and 0.1 wt%, between 0.03 wt% and 0.09 wt%, between 0.04 wt%and 0.08 wt%, or between 0.05 wt% and 0.07 wt%). In some embodiments, anadditional grounding unit (not shown in FIG. 1 ) can be coupled to sprayoutlets 153 to further reduce the risk of static electric charge. Thecleaning fluid supplied by spray outlets 153 can include, but notlimited to, hydrofluoric acid, hydrochloric acid, sulfuric acid,hydrogen peroxide, ammonium hydroxide, acetone, methanol, isopropylalcohol, deionized water (DI water), or a combination thereof. In someembodiments, the cleaning fluid can be a solution including, but notlimited to, a hydrochloric acid/hydrogen peroxide/DI water (HPM)solution, a sulfuric acid/ hydrogen peroxide/DI water (SPM) solution, ahydrochloric acid/ ozone/DI water (HOM) solution, a sulfuric acid/ozone/DI water (SOM) solution, an ammonium hydroxide/ ozone/DI water(AOM) solution, a hydrofluoric acid/DI water (DHF) solution, an ozonesolution (ozone diluted in DI water), or a combination thereof. In someembodiments, the cleaning fluid supplied by plurality of spray outlets153 can be the same as cleaning fluid 145 supplied by cleaning nozzle130. The cleaning fluid supplied by plurality of spray outlets 153 canbe different than cleaning fluid 145 supplied by cleaning nozzle 130.The choice of cleaning fluids can be determined by contaminants on thesurface of wafer 110. By way of example and not limitation, the HPMmixture is an acidic solution capable of removing metals from thesurface of the wafer. More specifically, the HPM can be a solution withhigh oxidation potential (e.g., higher than about 1.3 V) and low pH(e.g., below about 7). Consequently, metal contaminants on the surfaceof the wafer can be ionized and dissolved in the HPM solution during thewafer cleaning process. Prior to the wafer cleaning process, one or morewafers can be randomly selected to be screened for contaminants andparticles to assess the efficiency of the wafer cleaning process. Thecontaminants can be (i) any unwanted particles, organics, metallics, ornative oxides on the wafer’s surface that remaining after the wafercleaning process, (ii) chemical traces from the wet cleaning solutionsused during the wet cleaning and drying processing (e.g., water spots,acids, derivatives of ammonia, etc.), or (iii) a combination thereof.

In some embodiments, cleaning brush 150 can further include anultrasonic emitter 155 configured to provide ultrasonic vibration.Ultrasonic emitter 155 can provide ultrasonic energy propagating intoplurality of brush bristles 151 and the cleaning solution, by transducercrystals, during the wafer cleaning process. The transducer crystals canbe energized by a suitable power supply and oscillate at an ultrasonicfrequency in the range between about 28 kHz and about 600 kHz. Theultrasonic vibration can remove particles down to at least 0.3micrometer in diameter, including organic and inorganic impurities, fromthe surface (e.g., the back surface or backside) of wafer 110. Thetransducer crystals can be piezoelectric crystals (e.g., lead zirconatetitanate crystals or cobalt barium crystals). By way of example and notlimitation, ultrasonic emitter 155 can be placed under and in contactwith brush body 152. In some embodiments, ultrasonic emitter 155 can beplaced under brush body 152, pressure sensor 157, and/or location sensor159.

In some embodiments, cleaning brush 150 can further include a pressuresensor 159 configured to detect and monitor the pressure applied tocleaning brush 150 against wafer 110. Pressure sensor 159 cancommunicate a pressure reading to a control unit (not shown in FIG. 1 )that controls the pressure applied to cleaning brush 150 against wafer110 by controlling the movement of cleaning brush 150. For example, ifthe measured pressure is too large and raises concerns of wafer damage,pressure sensor 159 can send a request signal to the control unit tomove cleaning brush 150 away from wafer 110, thus applying less pressureto cleaning brush 150 against wafer 110 during the wafer cleaningprocess. The request signal can be transmitted by a wired communicationmeans or a wireless communication means (e.g., a radio frequency (RF)transmitter, or a Bluetooth (BT) transmitter. Pressure sensor 159 caninclude, but is not limited to, a piezoresistive pressure sensor, anelectromagnetic pressure sensor, a capacitive pressure sensor, apiezoelectric pressure sensor, and an optical pressure sensor. In someembodiments, a pressure applied to cleaning brush 150 against wafer 110can be between about 0.001 and about 0.05 kg/cm² during the wafercleaning process to maintain cleaning efficiency without damaging thesurface of wafer 110. In some embodiments, in response to the pressurebeing below 0.001 kg/cm², pressure sensor 159 can be configured to senda request signal to increase a cleaning time or increase the pressureapplied by cleaning brush 150 against wafer 110. In some embodiments, inresponse to the pressure being above 0.05 kg/cm², pressure sensor 159can be configured to send a request signal to reduce the pressureapplied by cleaning brush 150 against wafer 110.

In some embodiments, cleaning brush 150 can further include a locationsensor 159 configured to track the location of cleaning brush 150 onwafer 110. Location sensor 159 can transmit real-time location ofcleaning brush 150 on wafer 110 to a control unit (not shown in FIG. 1 )to ensure that cleaning brush 150 covers the entire surface of wafer110. In some embodiments, real-time location of cleaning brush 150 canbe transmitted by a wired communication means or a wirelesscommunication means (e.g., a radio frequency (RF) transmitter, or aBluetooth (BT) transmitter),

In some embodiments, wafer cleaning apparatus 100 can further includeone or more sensors (not shown in FIG. 1 ) configured to detect one ormore attributes associated with wafer 110, for example, in real time. Insome embodiments, the sensor can be an infrared (IR) sensor or any othersuitable sensor that can detect temperature of wafer 110 (e.g., in realtime). In some embodiments, the sensor can be a camera or any othersuitable sensor that can generate images in various wavelength ranges atthe front surface and/or back surface of wafer 110, for example, in realtime. The outputs of the sensors can be manually observed and analyzedby an operator and/or automatically received by an analyzing system forprocessing (e.g., to identify abnormal conditions). The number ofsensors used for (e.g., real-time) monitoring of wafer cleaningcondition is not limited. In some embodiments, a single sensor can beapplied to monitor a single attribute or multiple attributes associatedwith wafer 110. In some embodiments, additional sensor(s) can be used tomonitor attributes associated with other units in wafer cleaningapparatus 100, such as but not limited to, oxygen concentration inenclosure 105, humidity in enclosure 105, and a level of contaminationin enclosure 105 to ensure safety and/or manufacturing quality.

In some embodiments, wafer cleaning apparatus 100 can further include anexhaust unit 108 configured to expel a vapor generated from the cleaningfluid inside enclosure 105. Exhaust unit 108 can be installed throughone or more openings 106 at the ceiling, one of the vertical walls, orthe floor of enclosure 105. In some embodiments, exhaust unit 108 caninclude a duct located on the vertical walls of enclosure 105 to form apassageway for the cleaning fluid vapor to exit enclosure 105 of wafercleaning apparatus 100. The duct can be coated with adsorptionmaterials, such as activated carbon, for adsorbing the cleaning fluidvapor passing through duct. In some embodiments, exhaust unit 108 caninclude a rinse nozzle configured to generate a mist and to rinse thecleaning fluid vapor passing through duct with mist. A vaporconcentration can be reduced by mist from the rinse nozzle. In someembodiments, the mist can be formed by the rinse nozzle by mixing afluid and an inert gas, in which the mixture can have a greater vaporadsorbing ability than a liquid rinse alone.

FIG. 2 is a diagram of an exemplary cleaning brush 150 and an imagesensor 204 configured to monitor cleaning brush 150, in accordance withsome embodiments. The discussion of elements with the same annotationsin FIGS. 1 and 2 applies to each other unless otherwise mentioned. Eachbristle 151 can be coated with a coating layer 151 _(C) configured toindicate wear of each bristle 151. In some embodiments, coating layer151 _(C) can be a color changing wear indicator. The color changing wearindicator can be characterized in that as the period of use of cleaningbrush 150 progresses, the color of the wear indicator changes so that,when a predetermined color of the wear indicator is reached (e.g., thecolor red), this indicates that the recommended period of use forcleaning brush 150 has been reached. At this point, plurality ofbristles 151 or cleaning brush 150 can be replaced. In some embodiments,the materials of plurality of bristles 151 can include, but is notlimited to, polyethylene terephthalate (PET), polypropylene (PP),polyvinyl chloride (PVC), polyamide (PA), or a combination thereof. Insome embodiments, the materials for coating layer 151 _(C) can include,but is not limited to, poly (methyl methacrylate) (PMMA), oracrylonitrile butadiene styrene (ABS). Coating layer 151 _(C) can have adifferent color (e.g., white) than the color of bristle 151 (e.g., red).Coating layer 151 _(C) can have a lower wear resistance than that ofbristle 151. After a period of use for cleaning brush 150, coating layer151 _(C) can be partially worn out showing a change of color. The colorof bristle 151 can change from one color (e.g., the color white showinga completely covered coating layer 151 _(C1)) to another color (e.g.,the color red showing a partially worn out coating layer 151 _(C2)). Insome embodiments, image sensor 204 can be attached inside enclosure 105and oriented toward cleaning brush 150 to monitor usage of plurality ofbristles 151 by monitoring the color change.

FIGS. 3A and 3B are diagrams of an exemplary wafer cleaning apparatuses300 and 350 under different operation modes: a horizontal waferorientation (FIG. 3A) and a vertical wafer orientation (FIG. 3B), inaccordance with some embodiments. Each of apparatus 300 and 350 can bean embodiment of apparatus 100. The discussion of apparatus 100 can beapplied to apparatuses 300 and 350 unless mentioned otherwise. Further,the discussion of elements with the same annotations in FIGS. 1, 3A, and3B applies to each other unless otherwise mentioned. In the horizontalwafer orientation mode, wafer 110’s surface normal can be along thez-direction (e.g., along the gradational direction), as shown in FIG.3A. Therefore, in the horizontal wafer orientation mode, wafer holder120 (shown in FIG. 1 , not shown in FIGS. 3A and 3B) can be configuredto hold or secure wafer 110 horizontally (e.g., wafer 110’s surface canbe along the x-plane shown in FIG. 3A). In some embodiments, in thehorizontal wafer orientation mode, brush 150 can be configured tovibrate along direction 305 (e.g., in the z-direction) using ultrasonicemitter 155 (not shown in FIG. 3A) and displace along direction 303(e.g., along the x-y plane) to scrub and clean wafer 110. On the otherhand, in the vertical wafer orientation mode, wafer 110’s surface normalcan be perpendicular to the z-direction (e.g., perpendicular to thegravitational direction). As a result, wafer holder 120 can beconfigured to hold or secure wafer 110 vertically (e.g., wafer 110’ssurface can be along the x-z plane shown in FIG. 3B) Further, as shownin FIG. 3B, wafer cleaning apparatus 100 can further include aconnecting nozzle arm 137 configured to rotate cleaning nozzle 130(e.g., rotating about the y-axis) to spray cleaning fluid 145horizontally (e.g., in the y-direction) towards vertically (e.g., in thez-direction) oriented wafer 110. In some embodiments, connecting nozzlearm 137 can be configured to be rotational (e.g., about the y-axis) andtranslational (e.g., along the x-z plane; FIG. 3B) and spray cleaningfluid 145 via cleaning nozzle 130 towards vertically oriented wafer 110.In some embodiments, in the vertical wafer orientation mode, brush 150can be configured to vibrate along direction 353 (e.g., in they-direction) using ultrasonic emitter 155 (not shown in FIG. 3B) anddisplace along direction 355 (e.g., along the x-z plane) to scrub andclean wafer 110.

FIG. 4 is a flow chart of an exemplary wafer cleaning method 400, inaccordance with some embodiments, Operations shown in method 400 are notexhaustive; other operations can be performed as well before, after, orbetween any of the illustrated operations. In some embodiments,operations of method 400 can be performed in a different order.Variations of method 400 are within the scope of the present disclosure.

In operation 401, a wafer (e.g., wafer 110) is loaded onto a waferholder (e.g., wafer holder 120). For example, as shown in FIG. 1 , theloading of the wafer can include placing the wafer on wafer holder 120.In some embodiments, the loading of the wafer can include heating thewafer by a heating plate of the wafer holder before or during a wafercleaning process (e.g., operations 402-404 can be embodiments of thewafer cleaning process) to enhance a cleaning efficiency. In someembodiments, the loading of the wafer can include holding or securingthe wafer on wafer holder 120 via multiple support pins (e.g., supportpins 122) and multiple clamp pins (e.g., clamp pins 124) that canprevent the wafer from sliding during a wafer cleaning process (e.g.,operations 402-404). The wafer holder can be configured to hold (orsecure) the wafer horizontally (e.g., the wafer surface’s normal can bealong a gravitational direction, shown in FIG. 1 ) or vertically (e.g.,the wafer surface’s normal can be parallel to a gravitational direction,shown in FIG. 3B) during the wafer cleaning process. For example, theloading of the wafer can include horizontally (e.g., along the x-y planeof FIG. 1 ) placing the wafer on the wafer holder, securing the wafer onthe wafer holder using one or more support pins and/or clamp pins, androtating the wafer about 90 degrees to hold the wafer vertically (e.g.,along the x-z plane of FIG. 1 and FIG. 3B).

In operation 402, a flow of a cleaning fluid (e.g., cleaning fluid 145)is supplied (or dispensed) onto the wafer (e.g., a wafer’s front surfacewhere semiconductor devices are formed) through a cleaning nozzle (e.g.,cleaning nozzle 130). The cleaning fluid can include, but is not limitedto, hydrofluoric acid, hydrochloric acid, sulfuric acid, hydrogenperoxide, ammonium hydroxide, acetone, methanol, isopropyl alcohol,deionized water (DI water), or a combination thereof. In someembodiments, a portion of an outer surface of the cleaning nozzle can becovered with a conductive layer (e.g., conductive layer 134), such ascarbon nanotubes to reduce the static electric charge formed at thecleaning nozzle during operation. In some embodiments, the supply of theflow of the cleaning fluid can include attaching the cleaning nozzle toa nozzle arm (e.g., nozzle arm 135), and pivoting the nozzle arm arounda spindle (e.g., spindle 140). In some embodiments, the supply of theflow of the cleaning fluid can include rinsing the front surface of thewafer with the cleaning fluid. In some embodiments, the rinsing thefront surface of the wafer can be concurrently performed by pivoting thenozzle arm around the spindle. In some embodiments, the supply of theflow of the cleaning fluid can include forming a stream of the cleaningfluid via a pressure nozzle and injecting the stream of the cleaningfluid towards the front surface of the wafer (e.g., the cleaning nozzlecan be a pressure nozzle to rinse of the wafer). Further, operation 420can also include spinning the wafer on the wafer holder via a spin base(e.g., spin base 125) at different speeds and/or heating the wafer usingthe wafer holder. In some embodiments, the spinning and/or the heatingof the wafer can be conducted concurrently with the supply of thecleaning fluid.

In operation 403, a cleaning fluid is dispensed (or sprayed) onto a backsurface (e.g., backside) of the wafer through plurality of spray outlets(e.g., plurality of spray outlets 153) located on the cleaning brush(e.g., cleaning brush 150). The cleaning fluid for cleaning the backsurface (e.g., backside) of the wafer in operation 403 can be made ofthe same or different chemicals as that for cleaning the front surfaceof the wafer (e.g., the cleaning fluid described in operation 402). Insome embodiments, dispensing the cleaning fluid on the backside of thewafer can include rinsing the back surface of the wafer. In someembodiments, dispensing the cleaning fluid can include forming a streamof the cleaning fluid and directing the cleaning fluid through the sprayoutlets and towards the back surface of the wafer. In some embodiments,dispensing the cleaning fluid on the back side of the wafer can includeheating the wafer using the wafer holder. In some embodiments, one ormore operations described in 402 and 403 can be performed concurrently.In some embodiments, a portion of an outer surface of the spray outletscan be covered with a conductive layer (e.g., conductive layer 154) toreduce the risk of static electric charge.

In operation 404, the back surface (e.g., backside) of the wafer isbrushed via the cleaning brush. For example, the back surface of thewafer can be brushed via cleaning brush 150, while the wafer can beplaced or secured on wafer holder 120. In some embodiments, brushing theback side of the wafer via the cleaning brush can include applying apressure to the cleaning brush against the back surface of the wafer,spinning the wafer, and rotating/displacing the cleaning brush (referredherein as “scrubbing mode”) using a motion mechanism (e.g., a roboticarm or a motion stage) to scrub the wafer. In the scrubbing mode, thecleaning brush can be rotated at a rotational speed less than athreshold (e.g., about 2500 rpm) to ensure a stability control of thecleaning brush (e.g., the cleaning brush’s motion stability). In someembodiments, in the scrubbing mode, the wafer can be stationary whilethe cleaning brush is rotating/displacing to scrub the wafer’s backsurface. In some embodiments, in the scrubbing mode, rotating thecleaning brush can include spinning the cleaning brush counterclockwiseor clockwise. In some embodiments, in the scrubbing mode, rotating thecleaning brush can include interleaving a counterclockwise rotation ofthe cleaning brush with a clockwise rotation of the cleaning brush.Namely, rotating the cleaning brush can include alternatively rotatingthe cleaning brush counterclockwise and clockwise.

In some embodiments, brushing the back side of the wafer can includecontacting the back surface of the wafer with the cleaning brush,spinning the wafer, and vibrating the cleaning brush by, for example, anultrasonic vibration device (referred herein as “vibration mode”). Inthe vibration mode, the ultrasonic vibration of the cleaning brush canbe performed at a frequency between about 28 kHz and about 600 kHz.Vibrating the cleaning brush can include swinging the cleaning brushalong the wafer’s back surface’s normal (e.g., vibrate the cleaningbrush along in z-direction in FIG. 3A, or along the y-direction in FIG.3B). In some embodiments, brushing the back side of the wafer via thecleaning brush can include performing both the scrubbing mode and thevibration mode on the wafer’s back surface. In some embodiments,brushing the back side of the wafer can include concurrently performingone or more operations (e.g., applying the pressure or rotating thecleaning brush) previously described in the scrubbing mode and one ormore operations (e.g., vibrating the cleaning brush) previouslydescribed in the vibration mode. In some embodiments, brushing the backsurface of the wafer can include sequentially alternating betweenscrubbing mode and vibration mode.

In some embodiments, the cleaning fluid (e.g., cleaning fluid 145) canbe concurrently supplied to the wafer (e.g., the wafer’s front surfaceand/or back surface), while the wafer’s back surface is brushed by thecleaning brush (e.g., one or more operations described in operation 404can be performed concurrently with one or more operations described inoperation 402 and/or operation 403.)

Further, in operation 404, brushing the back surface of the wafer viathe cleaning brush can include detecting and adjusting a pressure of thecleaning brush against the wafer via a pressure sensor (e.g., pressuresensor 159). In some embodiments, the pressure to the cleaning brushagainst the wafer can be between about 0.001 and about 0.05 kg/cm² tomaintain a cleaning efficiency without damaging the surface of thewafer. In some embodiments, if the detected pressure is above 0.05kg/cm², the pressure sensor can send a request signal to a control unitto increase a separation between the cleaning brush and the wafer toreduce the pressure. In some embodiments, if the detected pressure isbelow 0.001 kg/cm², the pressure sensor can send a request signal to acontrol unit to decrease a separation between the cleaning brush and thewafer to enhance the pressure.

Further, in operation 404, the brushing of the back surface of the wafercan include tracking a location of the cleaning brush via a locationsensor (e.g., location sensor 159). The location sensor can transmit(e.g., real-time) location of the cleaning brush to a control unit toensure that the cleaning brush covers the entire back side surface ofthe wafer during the wafer cleaning process.

Further, in operation 404, brushing of the back surface of the wafer viathe cleaning brush can include detecting a visual signature of thecleaning brush, comparing the detected visual signature to a baselinesignature, and replacing the cleaning brush based on the comparison. Insome embodiments, detecting the visual signature of the cleaning brushcan include monitoring a color appearance of bristles associated withthe cleaning brush using an image sensor (e.g., image sensor 204 in FIG.2 ). The detected color appearance (e.g., the color of coating layer 151_(C2) of a worn cleaning brush shown in FIG. 2 ) can be compared to abaseline color signature of a qualified cleaning brush (e.g., the colorcoating layer 151 _(C1) of a new cleaning brush shown in FIG. 2 ). Ifthe comparison indicates the cleaning brush is worn out, the cleaningbrush needs to be replaced. In some embodiments, detecting the visualsignature, comparing the visual signature, and replacing the cleaningbrush can be performed prior to the scrubbing mode and the vibrationmode described previously (e.g., examine and replace the cleaning brushbefore starting to clean the wafer).

Various embodiments in accordance with the present disclosure provide anapparatus and a method for wafer cleaning in semiconductor devicemanufacturing. The apparatus can include a wafer holder configured tohold a wafer; a cleaning nozzle configured to dispense a cleaning fluidonto a first surface (e.g., front surface) of the wafer; and a cleaningbrush configured to clean a second surface (e.g., back surface) of thewafer. The cleaning brush can clean a back surface of the wafer withscrubbing and ultrasonic vibration and with a cleaning fluid. Suchapparatus and method can provide an enhanced and more effective cleaningto remove the defects from the wafer.

In some embodiments, an apparatus for wafer cleaning can include a waferholder configured to hold a wafer; a cleaning nozzle configured todispense a cleaning fluid onto a first surface of the wafer; and acleaning brush configured to clean a second surface, opposite to thefirst surface, of the wafer. The cleaning brush can include a pluralityof bristles and a plurality of spray outlets configured to dispense thecleaning fluid onto the second surface of the wafer. The apparatus canfurther include an enclosure configured to enclose the wafer holder, thecleaning nozzle and the cleaning brush.

In some embodiments, a method for cleaning a wafer can include loadingthe wafer onto a wafer holder, dispensing a cleaning fluid onto asurface of the wafer, spinning the wafer, and applying a pressure on thesurface of the wafer via a cleaning brush and a motion mechanism.

In some embodiments, a method for cleaning a wafer is disclosed. Themethod can include loading the wafer onto a wafer holder; rinsing afirst surface of the wafer by dispensing a cleaning fluid onto the firstsurface of the wafer; dispensing, with spray outlets on a cleaningbrush, the cleaning fluid onto a second surface, opposite to the firstsurface, of the wafer; and cleaning, with the cleaning brush, the secondsurface of the wafer. In some embodiments, cleaning the second surfaceof the wafer can include applying a pressure to the cleaning brushagainst the wafer, rotating the cleaning brush and vibrating thecleaning brush,

It is to be appreciated that the Detailed Description section, and notthe Abstract of the Disclosure, is intended to be used to interpret theclaims. The Abstract of the Disclosure section can set forth one or morebut not all exemplary embodiments contemplated and thus, are notintended to be limiting to the subjoined claims.

The foregoing disclosure outlines features of several embodiments sothat those skilled in the art can better understand the aspects of thepresent disclosure. Those skilled in the art will appreciate that theycan readily use the present disclosure as a basis for designing ormodifying other processes and structures for carrying out the samepurposes and/or achieving the same advantages of the embodimentsintroduced herein. Those skilled in the art will also realize that suchequivalent constructions do not depart from the spirit and scope of thepresent disclosure, and that they can make various changes,substitutions, and alterations herein without departing from the spiritand scope of the subjoined claims.

1. (canceled)
 2. An apparatus for wafer cleaning, comprising: a waferholder configured to hold a wafer; a cleaning nozzle configured todispense a cleaning fluid onto a first surface of the wafer; and acleaning brush configured to clean a second surface, opposite to thefirst surface, of the wafer, wherein the cleaning brush comprises: aplurality of bristles; and a plurality of spray outlets configured todispense the cleaning fluid onto the second surface of the wafer.
 3. Theapparatus of claim 2, further comprising an enclosure configured toenclose the wafer holder, cleaning nozzle, and cleaning brush, whereinthe enclosure comprises a noncombustible material.
 4. The apparatus ofclaim 3, wherein the noncombustible material comprises ethylenechlorotrifluoroethylene (ECTFE), polyvinylidene fluoride (PVDF),perfluoroalkoxy alkane (PFA), or a combination thereof.
 5. The apparatusof claim 2, wherein a portion of an outer surface of the cleaning nozzleis covered with a conductive layer.
 6. The apparatus of claim 2, whereinthe cleaning fluid comprises hydrofluoric acid, hydrochloric acid,sulfuric acid, hydrogen peroxide, ammonium hydroxide, deionized water,or a combination thereof.
 7. The apparatus of claim 2, wherein thecleaning brush further comprises: a brush body configured to hold theplurality of bristles; and an ultrasonic emitter in contact with thebrush body configured to ultrasonically vibrate the plurality ofbristles.
 8. The apparatus of claim 2, wherein the cleaning brushfurther comprises a pressure sensor configured to detect a pressureapplied to the cleaning brush against the wafer.
 9. The apparatus ofclaim 2, wherein the cleaning brush further comprises a location sensorconfigured to track a location of the cleaning brush on the secondsurface of the wafer.
 10. The apparatus of claim 2, wherein theplurality of bristles comprises polyethylene terephthalate (PET),polypropylene (PP), polyvinyl chloride (PVC), polyamide (PA), or acombination thereof.
 11. The apparatus of claim 2, wherein the pluralityof bristles comprises a coating layer configured to indicate wear of theplurality of bristles.
 12. The apparatus of claim 2, further comprisingan image sensor configured to monitor usage of the plurality of bristlesbased on a color appearance of the plurality of bristles.
 13. Theapparatus of claim 2, wherein the plurality of bristles comprises afirst plurality of bristles and a second plurality of bristles, whereinthe first plurality of the bristles is longer than the second pluralityof the bristles.
 14. An apparatus for wafer cleaning, comprising: anozzle configured to dispense a cleaning fluid onto a first surface ofthe wafer; and a brush configured to clean a second surface of thewafer, wherein the brush comprises: a first set of bristles comprising afirst length and a first material; a second set of bristles comprising asecond length and a second material different from the first length andfirst material, respectively; and a spray outlet comprising a conductivelayer disposed on an outer surface of the spray outlet and configured todispense the cleaning fluid onto the second surface of the wafer. 15.The apparatus of claim 14, wherein the first and second sets of bristlescomprise coating layers configured to indicate usage of the first andsecond of bristles.
 16. The apparatus of claim 14, wherein the brushfurther comprises a location sensor configured to track a location ofthe brush on the second surface of the wafer in real-time.
 17. Theapparatus of claim 14, further comprising a wafer holder configured tohold the wafer and to rotate and heat the wafer concurrently.
 18. Anapparatus for wafer cleaning, comprising: a wafer holder configured tohold a wafer in a horizontal orientation in a first mode of operationand to hold the wafer in a vertical orientation in a second mode ofoperation; a nozzle configured to dispense a cleaning fluid onto a firstsurface of the wafer; and a brush configured to clean a second surfaceof the wafer, wherein the brush comprises: bristles of different lengthsand diameters disposed on a base structure, a pressure sensor configuredto detect a pressure applied to the brush against the wafer, and a sprayoutlet configured to dispense the cleaning fluid onto the second surfaceof the wafer.
 19. The apparatus of claim 18, wherein the brush furthercomprises an image sensor configured to monitor a change in color of thebristles.
 20. The apparatus of claim 18, wherein the brush furthercomprises a location sensor configured to track a location of the brushon the second surface of the wafer in real-time.
 21. The apparatus ofclaim 18, wherein the spray outlet is embedded in the base structure.